Product Categories

Automatic double-sided lithography machine MA-4200 series

*2/4/6'' wafer compatible
*EAP/SCES GEM Correspondence
Automatic double-sided lithography machine MA-4300 series

*6/8" compatible
*High-speed and stable fully automatic operation
Automatic double-sided lithography machine MA-5301 series

*6" / 8" / 12" compatible (smif / foup correspondence)
*High-speed and stable fully automatic operation
Manual lithography machine DA-1000 series

*Manual single-sided exposure machine for experimental research on substrates such as glass, Wafer, and film.
*Compatible with wafer up to 4" and fragments
Semi-automatic lithography machine MA-1000 series

*Compatible with 8" 6" 4" pieces
Ambient temperature bonding machine

★ The same bonding strength as the base material can be obtained at room temperature (room temperature) bonding process ★ No thermal distortion/thermal stress during bonding
Ambient temperature bonding machine

★ The same bond strength as the base material can be obtained at room temperature (room temperature) bonding process ★ No thermal deformation/thermal stress during bonding
EBL Electron Beam Direct Tracer 9500
EBL Electron Beam Direct Stroke Machine 8100

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