Product Information > Automatic double-sided lithography machine MA-4200 series

Automatic double-sided lithography machine MA-4200 series

Main Specialties

    The original parallel adjustment mechanism enables high precision setting of the proximity gap between the mask and the wafer.                                            

    Image processing technology enables pre-alignment for thin substrates, warped substrates and fragile wafers such as crystals (optional).                                  

    The original contact pressure precision control mechanism enables high-precision contact between the wafer and the mask.


Main specifications

※Substrate size
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