Equipped with our original mirrored optical system LAMP HOUSE. This achieves uniformity and high illumination in the irradiated surface.
Our original coaxial alignment method and high-speed image processing technology are used to achieve high accuracy alignment. IR method and back side method are also supported.
Our original optical gap sensor enables high-speed, accurate setting of the proximity gap between the mask and substrate without contact.
Equipped with a mask changer. Up to 20 masks can be changed automatically.
Up to 3 load ports can be installed.
