Main Features
High-precision alignment of Wafer and mask is achieved by our original high-speed image processing technology.
Up to two baskets can be installed on the loader and unloader sides (optional).
A cooling mechanism is provided to manage the temperature of the substrate table and mask (optional).
Our original mirror optical system, the LAMP HOUSE, is installed. This enables uniformity and high illumination in the irradiated surface.
Equipped with a non-contact pre-alignment system (PREALIGNER). This enables high precision feeding without any damage to the substrate.
Equipped with automatic mask changer. Mask storage is also available. Up to 10 MASKs can be placed.
